发明授权
- 专利标题： Method of manufacturing a multilayered piezoelectric element having internal electrodes and side electrodes
- 专利标题（中）： 具有内部电极和侧面电极的多层压电元件的制造方法
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申请号： US12126459申请日： 2008-05-23
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公开(公告)号： US07765660B2公开(公告)日： 2010-08-03
- 发明人: Tetsu Miyoshi
- 申请人： Tetsu Miyoshi
- 申请人地址： JP Tokyo
- 专利权人： FUJIFILM Corporation
- 当前专利权人： FUJIFILM Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Sughrue Mion, PLLC
- 优先权： JP2005-342915 20051128
- 主分类号： H01L41/22
- IPC分类号： H01L41/22
摘要：
A method of manufacturing a multilayered piezoelectric element having a multilayered structure by which an internal electrode and a side electrode are strongly connected. The method includes the steps of: forming first and second side surfaces by dicing the multilayered structure to protrude end portions of first and second electrode layers to an outer side than adjacent piezoelectric material layers and secure insulating regions between each electrode layer and respective one side surface; and forming a first side electrode on the first side surface and a second side electrode on the second side surface.
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