Invention Grant
US07766001B2 Device and method for positioning and blocking thin substrates on a cut substrate block
有权
在切割的基板块上定位和阻挡薄基板的装置和方法
- Patent Title: Device and method for positioning and blocking thin substrates on a cut substrate block
- Patent Title (中): 在切割的基板块上定位和阻挡薄基板的装置和方法
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Application No.: US11921958Application Date: 2006-05-26
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Publication No.: US07766001B2Publication Date: 2010-08-03
- Inventor: Josef Gentischer , Dirk Habermann
- Applicant: Josef Gentischer , Dirk Habermann
- Applicant Address: DE Niedereschach
- Assignee: Schmid Technology Systems GmbH
- Current Assignee: Schmid Technology Systems GmbH
- Current Assignee Address: DE Niedereschach
- Agency: Bacon & Thomas, PLLC
- Priority: DE102005028112 20050613
- International Application: PCT/EP2006/005037 WO 20060526
- International Announcement: WO2006/133798 WO 20061221
- Main IPC: B28D7/04
- IPC: B28D7/04 ; B26D7/32 ; B65D85/62

Abstract:
A device for positioning and blocking thin silicon wafers after wire-sawing a silicon wafer block. The device comprises a cassette that accommodates the wafer block and is provided with two contact strips whose sides facing the wafer block encompass elements which engage into narrow cutting gap between the wafers so as to maintain a distance and provide support. This allows the wafers to be fixed in the position thereof even after removing a supporting glass plate such that particularly the gap in the area of the former connecting point to the removed supporting glass plate is maintained and the subsequent singulation process is simplified.
Public/Granted literature
- US20090232627A1 Device and method for positioning and blocking thin substrates on a cut substrate block Public/Granted day:2009-09-17
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