The present invention provides for an improved process for producing ozone which can be used to remove contaminants from gas streams in industrial processes. The improved process uses a separation device after the ozone generating system to separate the ozone from the oxygen gas and directs the ozone to the industrial process and the oxygen back to the feedstream entering the ozone generating system. The improved process further provides for the use of ozone so generated to removed contaminants from industrial process flue gas streams.