Invention Grant
US07767041B2 Ag-Bi-base alloy sputtering target, and method for producing the same
有权
Ag-Bi基合金溅射靶及其制造方法
- Patent Title: Ag-Bi-base alloy sputtering target, and method for producing the same
- Patent Title (中): Ag-Bi基合金溅射靶及其制造方法
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Application No.: US10844345Application Date: 2004-05-13
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Publication No.: US07767041B2Publication Date: 2010-08-03
- Inventor: Katsutoshi Takagi , Junichi Nakai , Yuuki Tauchi , Toshiki Sato , Hitoshi Matsuzaki , Hideo Fujii
- Applicant: Katsutoshi Takagi , Junichi Nakai , Yuuki Tauchi , Toshiki Sato , Hitoshi Matsuzaki , Hideo Fujii
- Applicant Address: JP Kobe-shi JP Kobe-shi
- Assignee: Kabushiki Kaisha Kobe Seiko Sho,Kobelco Research Institute Inc.
- Current Assignee: Kabushiki Kaisha Kobe Seiko Sho,Kobelco Research Institute Inc.
- Current Assignee Address: JP Kobe-shi JP Kobe-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2003-139293 20030516
- Main IPC: C22C5/06
- IPC: C22C5/06 ; C22F1/14

Abstract:
The sputtering target made of a Ag—Bi-base alloy contains Bi in solid solution with Ag. The sputtering target has an intensity of precipitated Bi of 0.01 at %−1 or less, as calculated by the following mathematical expression (1) based on analysis results of X-ray diffraction, and/or a sum of area ratios of predetermined intensities (third to sixth intensities in 8 intensities) of 89% or more, wherein the area ratios are obtained by calculating a planar distribution of characteristic X-ray intensities of Bi according to X-ray microanalysis: intensity of precipitated Bi=[IBi(102)/IAg(111)+IAg(200)+IAg(220)+IAg(311))]/[Bi]. Remarkable lowering of the yield of Bi content in resultant films can be suppressed by using the sputtering target.
Public/Granted literature
- US20040226818A1 Ag-Bi-base alloy sputtering target, and method for producing the same Public/Granted day:2004-11-18
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