Invention Grant
US07767139B2 AlRu sputtering target and manufacturing method thereof 有权
AlRu溅射靶及其制造方法

AlRu sputtering target and manufacturing method thereof
Abstract:
An AlRu sputtering target that is a sintered body composed of an AlRu intermetallic compound of 95 vol. % or more is provided. It is manufactured by a stable and low-cost method that provides it with an even texture, significantly reduces oxygen, prevents or suppresses the generation of particles, and improves the yield ratio of deposition goods.
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