Invention Grant
- Patent Title: Microstructure, pattern medium and process for producing same
- Patent Title (中): 微结构,图案介质及其制造方法
-
Application No.: US11751661Application Date: 2007-05-22
-
Publication No.: US07767265B2Publication Date: 2010-08-03
- Inventor: Hiroshi Yoshida , Hideki Nagano , Hirokazu Hasegawa , Mikihito Takenaka , Feng Chen
- Applicant: Hiroshi Yoshida , Hideki Nagano , Hirokazu Hasegawa , Mikihito Takenaka , Feng Chen
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2006-142247 20060523
- Main IPC: B05D3/02
- IPC: B05D3/02

Abstract:
It is an object to provide a microstructure having cylindrical microdomains oriented in the film thickness direction and arranged in a regular pattern, for which a microphase separation phenomenon of a block copolymer is utilized. The process for producing the microstructure includes 2 steps; the first step for arranging, on a substrate (40), a polymer layer at least containing a block copolymer having a first block which constitutes a continuous phase (10) of the microstructure (30) and a second block which constitutes microdomains (20) dispersed in the continuous phase (10) and oriented in the thickness direction; and second step for thermally treating the substrate (40) at a neutral temperature (Tn), at which a first material (A) and second material (B) which constitute the respective first and second blocks have substantially the same interfacial tension with the substrate (40) surface (X).
Public/Granted literature
- US20080290067A1 MICROSTRUCTURE, PATTERN MEDIUM AND PROCESS FOR PRODUCING SAME Public/Granted day:2008-11-27
Information query