Invention Grant
- Patent Title: Method for coating a support with a material
- Patent Title (中): 用材料涂覆载体的方法
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Application No.: US10497052Application Date: 2002-11-28
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Publication No.: US07767269B2Publication Date: 2010-08-03
- Inventor: Peter Choi
- Applicant: Peter Choi
- Applicant Address: FR
- Assignee: EPPRA
- Current Assignee: EPPRA
- Current Assignee Address: FR
- Agency: Lerner, David, Littenberg, Krumholz & Mentlik, LLP
- Priority: FR0115366 20011128
- International Application: PCT/FR02/04087 WO 20021128
- International Announcement: WO03/046248 WO 20030605
- Main IPC: C23C14/48
- IPC: C23C14/48 ; C23C16/50 ; C23C16/56 ; H05H1/52 ; H05H1/46

Abstract:
The invention concerns a method for coating a support (10) comprising a first material with a coating layer comprising a second material, including at least a phase (A, A′) for deposition of a layer of given thickness of coherent material (11, 13) on the support surface during which the interaction between an ion source and a plasma is used. The invention is characterized in that each phase (A, A′) of material deposition is followed by a phase (B, B′) for exposure of the support and the deposited layer of material (11, 13) to a pulse of limited duration of an ionic bombardment with high energy density of selected energy density level.
Public/Granted literature
- US20050147767A1 Method for coating a support with a material Public/Granted day:2005-07-07
Information query
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