To provide an imprinting mold, of which a coating layer formed on its surface is hardly susceptible to peeling, and a process for its production.An imprinting mold comprising a mold body and a coating layer made of a release agent, formed on the surface of the mold body, wherein the release agent contains a compound of the following formula (1), and a process for its production: wherein R is Rf—X—, both R are the same group, Rf is a perfluoroalkyl group, X is at least one member selected from —(OC3F6)—, —(OC2F4)— and —(OCF2)—, provided that the sum of such units is at least 1, Y is an organic group, is an average of n is from 2 to 10, Z is —Si(R1)m(R2)3-m, R1 is a hydroxyl group or a hydrolysable group, R2 is a hydrogen atom or a hydrocarbon group, and m is from 1 to 3.