Invention Grant
US07767377B2 Positive type resist composition, process for forming resist pattern, and process for performing ion implantation
有权
正型抗蚀剂组合物,形成抗蚀剂图案的工艺,以及用于进行离子注入的工艺
- Patent Title: Positive type resist composition, process for forming resist pattern, and process for performing ion implantation
- Patent Title (中): 正型抗蚀剂组合物,形成抗蚀剂图案的工艺,以及用于进行离子注入的工艺
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Application No.: US11587713Application Date: 2005-04-19
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Publication No.: US07767377B2Publication Date: 2010-08-03
- Inventor: Shinichi Kohno , Takeshi Iwai , Ryotaro Hayashi
- Applicant: Shinichi Kohno , Takeshi Iwai , Ryotaro Hayashi
- Applicant Address: JP Kawasaki-shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe Martens Olson & Bear, LLP
- Priority: JP2004-134075 20040428
- International Application: PCT/JP2005/007439 WO 20050419
- International Announcement: WO2005/106587 WO 20051110
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/30

Abstract:
The present invention is a positive type resist composition comprising a resin component (A) for use in a resist, having alkali solubility which increases under the action of an acid, an acid generator component (B) which generates an acid upon being exposed, and an organic solvent which dissolves the resin component (A) and the acid generator component (B), wherein the resin component (A) contains the resin component (A1) for use in a resist having alkali solubility which increases under the action of an acid having the following structural units (a1), (a2) and (a3): structural unit (a1): a structural unit derived from an (α-lower alkyl) acrylic ester which contains acid-dissociable, dissolution-inhibiting groups expressed by the following general formula (1): [chemical formula 1] (in formula (1), R represents a hydrogen atom or a lower alkyl group, R11represents acid-dissociable, dissolution-inhibiting groups consisting of chain tertiary alkyl groups), structural unit (a2): a structural unit derived from an (α-lower alkyl) acrylic ester which contains lactone-containing monocyclic or polycyclic groups, structural unit (a3): a structural unit derived from an (α-lower alkyl) acrylic ester which contains polycyclic and alicyclic hydrocarbon groups which contain polar groups.
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