Invention Grant
- Patent Title: Solid-state imaging device and method for manufacturing same
- Patent Title (中): 固态成像装置及其制造方法
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Application No.: US12511402Application Date: 2009-07-29
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Publication No.: US07767485B2Publication Date: 2010-08-03
- Inventor: Masaaki Ogawa , Hitoshi Sugiyama
- Applicant: Masaaki Ogawa , Hitoshi Sugiyama
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-199287 20080801
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
An interconnect layer is formed on a lower face of a silicon wafer, a support substrate is adhered over a lower face of the interconnect layer, and a thickness reduction of the silicon wafer is performed from an upper face side. Next, a photodiode is formed in an upper face of the silicon wafer, and a microlens is formed at a position corresponding to the photodiode. An adhesive layer is formed on the silicon wafer in a region not covering the microlens, a low refractive index layer having a lower refractive index than the microlens is formed in a region covering the microlens, and a glass substrate is adhered to the silicon wafer by the adhesive layer. The support substrate is removed from the interconnect layer, and a solder ball is bonded to a lower face of the interconnect layer. Thereafter, a CMOS image sensor is manufactured by dicing the silicon wafer.
Public/Granted literature
- US20100025791A1 SOLID-STATE IMAGING DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2010-02-04
Information query
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