Invention Grant
- Patent Title: Method of manufacturing layered chip package
- Patent Title (中): 分层芯片封装的制造方法
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Application No.: US12216144Application Date: 2008-06-30
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Publication No.: US07767494B2Publication Date: 2010-08-03
- Inventor: Yoshitaka Sasaki , Hiroyuki Ito , Tatsuya Harada , Nobuyuki Okuzawa , Satoru Sueki
- Applicant: Yoshitaka Sasaki , Hiroyuki Ito , Tatsuya Harada , Nobuyuki Okuzawa , Satoru Sueki
- Applicant Address: US CA Milpitas JP Tokyo
- Assignee: Headway Technologies, Inc.,TDK Corporation
- Current Assignee: Headway Technologies, Inc.,TDK Corporation
- Current Assignee Address: US CA Milpitas JP Tokyo
- Agency: Oliff & Berridge, PLC
- Main IPC: H01L21/60
- IPC: H01L21/60 ; H01L23/485

Abstract:
A manufacturing method for a layered chip package including a stack of a plurality of layer portions includes the steps of: fabricating a layered substructure by stacking a plurality of substructures each including a plurality of layer portions corresponding to the plurality of layer portions of the layered chip package; and fabricating a plurality of layered chip packages by using the layered substructure. The step of fabricating the layered substructure includes: fabricating a first and a second pre-polishing substructure; bonding the first pre-polishing substructure to a jig such that a first surface of the first pre-polishing substructure faces the jig; forming a first substructure by polishing a second surface of the first pre-polishing substructure; bonding the second pre-polishing substructure to the first substructure such that a first surface of the second pre-polishing substructure faces the polished surface of the first substructure; and forming a second substructure by polishing a second surface of the second pre-polishing substructure.
Public/Granted literature
- US20090325345A1 Method of manufacturing layered chip package Public/Granted day:2009-12-31
Information query
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