Invention Grant
- Patent Title: Method for producing a vertical transistor component
- Patent Title (中): 垂直晶体管部件的制造方法
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Application No.: US11241867Application Date: 2005-09-30
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Publication No.: US07767527B2Publication Date: 2010-08-03
- Inventor: Martin Poelzl , Walter Rieger
- Applicant: Martin Poelzl , Walter Rieger
- Applicant Address: DE Munich
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Munich
- Agency: Maginot, Moore & Beck
- Priority: DE102004047627 20040930
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A method for producing a vertical transistor component includes steps of providing a semiconductor substrate, applying an auxiliary layer to the semiconductor substrate, and patterning the auxiliary layer for the purpose of producing at least one trench which extends as far as the semiconductor substrate and which has opposite sidewalls. The method further includes producing a monocrystalline semiconductor layer on at least one of the sidewalls of the trench, producing an electrode insulated from the monocrystalline semiconductor layer on the at least one sidewall of the trench and the semiconductor substrate.
Public/Granted literature
- US20060097312A1 Method for producing a vertical transistor component Public/Granted day:2006-05-11
Information query
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