Invention Grant
- Patent Title: Method and apparatus for printing conductive ink
- Patent Title (中): 用于印刷导电油墨的方法和装置
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Application No.: US11243973Application Date: 2005-10-06
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Publication No.: US07767553B2Publication Date: 2010-08-03
- Inventor: Yasuo Tanaka
- Applicant: Yasuo Tanaka
- Applicant Address: JP Tokyo
- Assignee: Oki Semiconductor Co., Ltd.
- Current Assignee: Oki Semiconductor Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Rabin & Berdo, PC
- Priority: JP2004-307334 20041021
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Conductive ink is printed onto a wafer held on a vertically movable stage by using a squeegee to force the conductive ink through a stencil. The stencil is supported from below by a supporting member adjacent to the periphery of the stage. After the conductive ink has been printed through the stencil, pneumatic pressure is applied to the stencil from above, and the stage is lowered to separate the wafer from the stencil. The supporting member holds the stencil taut while the stage is being lowered, so that the stencil does not warp downward and the printed conductive ink leaves the stencil at substantially the same time at all points on the wafer surface, preventing the premature escape of air and loss of pneumatic pressure.
Public/Granted literature
- US20060086269A1 Method and apparatus for printing conductive ink Public/Granted day:2006-04-27
Information query
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