Invention Grant
US07767556B2 Adhesive sheet for laser dicing and its manufacturing method 有权
激光切割用粘合片及其制造方法

Adhesive sheet for laser dicing and its manufacturing method
Abstract:
An adhesive sheet for laser dicing is used for dicing a workpiece into individual chips by light absorption ablation of laser beam and has at least an adhesive layer on one side of a base material which has a surface opposite to the adhesive layer having no convex parts of width (W) of 20 mm or less and height (h) of 1 μm or more, or no concave parts of width (W) of 20 mm or less and depth (d) of 1 μm or more.
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