Invention Grant
- Patent Title: Adhesive sheet for laser dicing and its manufacturing method
- Patent Title (中): 激光切割用粘合片及其制造方法
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Application No.: US12484939Application Date: 2009-06-15
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Publication No.: US07767556B2Publication Date: 2010-08-03
- Inventor: Yuji Okawa
- Applicant: Yuji Okawa
- Applicant Address: JP Osaka
- Assignee: Nitto Denko Corporation
- Current Assignee: Nitto Denko Corporation
- Current Assignee Address: JP Osaka
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2004-044188 20040220
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
An adhesive sheet for laser dicing is used for dicing a workpiece into individual chips by light absorption ablation of laser beam and has at least an adhesive layer on one side of a base material which has a surface opposite to the adhesive layer having no convex parts of width (W) of 20 mm or less and height (h) of 1 μm or more, or no concave parts of width (W) of 20 mm or less and depth (d) of 1 μm or more.
Public/Granted literature
- US20090253231A1 ADHESIVE SHEET FOR LASER DICING AND ITS MANUFACTURING METHOD Public/Granted day:2009-10-08
Information query
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