Invention Grant
- Patent Title: Chilled wafer dicing
- Patent Title (中): 冷却晶圆切片
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Application No.: US11747310Application Date: 2007-05-11
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Publication No.: US07767557B2Publication Date: 2010-08-03
- Inventor: William Jeffery Reeder
- Applicant: William Jeffery Reeder
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for dicing a wafer is disclosed. One illustrative method includes forming a layer of frozen material above a plurality of integrated circuit dies on a substrate and performing a cutting process to cut through the layer of frozen material and the substrate to singulate the plurality of dies. Another method includes performing a cutting process to singulate a plurality of integrated circuit dies having a layer of frozen material formed above the plurality of dies.
Public/Granted literature
- US20080280423A1 CHILLED WAFER DICING Public/Granted day:2008-11-13
Information query
IPC分类: