Invention Grant
- Patent Title: Method for manufacturing a structure in a semiconductor device and a structure in a semiconductor device
- Patent Title (中): 半导体装置的结构的制造方法以及半导体装置的结构
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Application No.: US11549487Application Date: 2006-10-13
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Publication No.: US07767571B2Publication Date: 2010-08-03
- Inventor: Christoph Noelscher , Sebastian Mosler
- Applicant: Christoph Noelscher , Sebastian Mosler
- Applicant Address: DE Munich
- Assignee: Qimonda AG
- Current Assignee: Qimonda AG
- Current Assignee Address: DE Munich
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L21/84
- IPC: H01L21/84

Abstract:
The invention is concerned with a method for manufacturing a local wiring in a semiconductor device, comprising the manufacturing of at least two electrically conducting structures essentially in the same horizontal level in a layered stack on a substrate, the at least two electrically conducting structures being separated by a gap filled with at least one dielectric material, the gap being electrically bridged by conductive material, to form at least one contact element electrically connecting the at least two electrically conducting structures, whereby at least one contact element is produced in a single lithographic step.
Public/Granted literature
- US20080090398A1 Method for Manufacturing a Structure in a Semiconductor Device and a Structure in a Semiconductor Device Public/Granted day:2008-04-17
Information query
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