Invention Grant
US07767591B2 Method and device for producing electronic components 失效
用于生产电子元件的方法和装置

  • Patent Title: Method and device for producing electronic components
  • Patent Title (中): 用于生产电子元件的方法和装置
  • Application No.: US11918814
    Application Date: 2006-04-21
  • Publication No.: US07767591B2
    Publication Date: 2010-08-03
  • Inventor: Rolf Treude
  • Applicant: Rolf Treude
  • Applicant Address: DE Erndtebruck
  • Assignee: Steiner GmbH & Co. KG
  • Current Assignee: Steiner GmbH & Co. KG
  • Current Assignee Address: DE Erndtebruck
  • Agent Andrew Wilford
  • Priority: DE102005018984 20050422
  • International Application: PCT/EP2006/003678 WO 20060421
  • International Announcement: WO2006/111400 WO 20061026
  • Main IPC: H01L21/31
  • IPC: H01L21/31
Method and device for producing electronic components
Abstract:
The invention relates to a method for producing electronic components in a vacuum. The aim of the invention is to create flexible electronic components that have an optimum action, are cost-effective, and easy to produce in a single working cycle. To this end, a carrier film (12) is partially and/or selectively compressed with a blocking liquid, and is subjected to cathodic sputtering. A metallic layer is deposited on the carrier film (12) in the region free of the blocking layer, and the blocking liquid is evaporated during the evaporation process. A semiconductor agent is applied to the coated carrier film (12) during another evaporation process, and a coating with acrylate is then carried out. The carrier liquid is then partially and/or selectively reapplied to the acrylate layer and a cathodic sputtering is carried out. The cited coating processes are optionally repeated, and connections can be established between the individual metallized layers.
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