Invention Grant
US07767927B2 Methods and apparatus for remote temperature measurement of a specular surface 有权
用于远程测量镜面的方法和装置

  • Patent Title: Methods and apparatus for remote temperature measurement of a specular surface
  • Patent Title (中): 用于远程测量镜面的方法和装置
  • Application No.: US11129971
    Application Date: 2005-05-16
  • Publication No.: US07767927B2
    Publication Date: 2010-08-03
  • Inventor: David A. Markle
  • Applicant: David A. Markle
  • Applicant Address: US CA San Jose
  • Assignee: Ultratech, Inc.
  • Current Assignee: Ultratech, Inc.
  • Current Assignee Address: US CA San Jose
  • Agency: Peters Verny, LLP
  • Agent Allston L. Jones
  • Main IPC: G01J5/54
  • IPC: G01J5/54 B23K26/00
Methods and apparatus for remote temperature measurement of a specular surface
Abstract:
Methods and apparatus for remotely measuring temperature of a specular surface. Method takes two measurements of P-polarized radiation emitted at or near Brewster angle from the surface. First measurement (SA) collects and detects first amount of radiation emitted directly from a surface portion using a collection optical system. Second measurement (SB) includes first amount of radiation and adds quantity of radiation collected at or near at/near Brewster angle and reflected from the surface with a retro optical system with a round-trip transmission t2 that retro-reflects a quantity of radiation received from surface portion back to same surface portion where it reflects and combines with first amount of radiation collected by collection optical system. Measurements SA and SB and t2 are used to determine surface emissivity (ξ). Calibration curve is used that relates ratio of the first measurement SA to surface emissivity (SA/ξ), to surface temperature. Surface temperature determined from SA/ξ by calibration curve.
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