Invention Grant
US07767962B2 Method for SEM measurement of features using magnetically filtered low loss electron microscopy
失效
使用磁滤波低损耗电子显微镜对特征进行SEM测量的方法
- Patent Title: Method for SEM measurement of features using magnetically filtered low loss electron microscopy
- Patent Title (中): 使用磁滤波低损耗电子显微镜对特征进行SEM测量的方法
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Application No.: US11581498Application Date: 2006-10-16
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Publication No.: US07767962B2Publication Date: 2010-08-03
- Inventor: Lynne Gignac , Oliver Wells
- Applicant: Lynne Gignac , Oliver Wells
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Rodney T Hodgson
- Main IPC: H01J37/244
- IPC: H01J37/244
Abstract:
A magnetically focused scanning charged particle microscope having an array detector placed to detect scattered particles, wherein the particles fall substantially non-tangentially to the surface of the array detector.
Public/Granted literature
- US20070029479A1 Method for SEM measurement of features using magnetically filtered low loss electron microscopy Public/Granted day:2007-02-08
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