Invention Grant
- Patent Title: Ion source
- Patent Title (中): 离子源
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Application No.: US12417929Application Date: 2009-04-03
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Publication No.: US07767977B1Publication Date: 2010-08-03
- Inventor: Ludovic Godet , Svetlana Radovanov , Timothy J. Miller
- Applicant: Ludovic Godet , Svetlana Radovanov , Timothy J. Miller
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J49/10
- IPC: H01J49/10 ; H01J37/08 ; H01J23/06

Abstract:
An ion source includes an arc chamber having an extraction aperture, and a plasma sheath modulator. The plasma sheath modulator is configured to control a shape of a boundary between plasma and a plasma sheath proximate the extraction aperture. The plasma sheath modulator may include a pair of insulators positioned in the arc chamber and spaced apart by a gap positioned proximate the extraction aperture. A well focused ion beam having a high current density can be generated by the ion source. A high current density ion beam can improve the throughput of an associated process. The emittance of the ion beam can also be controlled.
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