发明授权
- 专利标题: Ion source
- 专利标题(中): 离子源
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申请号: US12417929申请日: 2009-04-03
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公开(公告)号: US07767977B1公开(公告)日: 2010-08-03
- 发明人: Ludovic Godet , Svetlana Radovanov , Timothy J. Miller
- 申请人: Ludovic Godet , Svetlana Radovanov , Timothy J. Miller
- 申请人地址: US MA Gloucester
- 专利权人: Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人: Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人地址: US MA Gloucester
- 主分类号: H01J49/10
- IPC分类号: H01J49/10 ; H01J37/08 ; H01J23/06
摘要:
An ion source includes an arc chamber having an extraction aperture, and a plasma sheath modulator. The plasma sheath modulator is configured to control a shape of a boundary between plasma and a plasma sheath proximate the extraction aperture. The plasma sheath modulator may include a pair of insulators positioned in the arc chamber and spaced apart by a gap positioned proximate the extraction aperture. A well focused ion beam having a high current density can be generated by the ion source. A high current density ion beam can improve the throughput of an associated process. The emittance of the ion beam can also be controlled.
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