Invention Grant
US07768006B2 Field effect structure and method including spacer shaped metal gate with asymmetric source and drain regions 有权
场效应结构和方法包括具有不对称源极和漏极区域的间隔金属栅极

Field effect structure and method including spacer shaped metal gate with asymmetric source and drain regions
Abstract:
A semiconductor structure and a method for fabricating the semiconductor structure provide a field effect device, such as a field effect transistor, that includes a spacer shaped metal gate located over a channel within a semiconductor substrate that separates a plurality of source and drain regions within the semiconductor substrate. Within the semiconductor structure, the plurality of source and drain regions is asymmetric with respect to the spacer shaped metal gate. The particular semiconductor structure may be fabricated using a self aligned dummy gate method that uses a portion of a spacer as a self alignment feature when forming the spacer shaped metal gate, which may have a sub-lithographic linewidth.
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