Invention Grant
US07768006B2 Field effect structure and method including spacer shaped metal gate with asymmetric source and drain regions
有权
场效应结构和方法包括具有不对称源极和漏极区域的间隔金属栅极
- Patent Title: Field effect structure and method including spacer shaped metal gate with asymmetric source and drain regions
- Patent Title (中): 场效应结构和方法包括具有不对称源极和漏极区域的间隔金属栅极
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Application No.: US12129033Application Date: 2008-05-29
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Publication No.: US07768006B2Publication Date: 2010-08-03
- Inventor: Huilong Zhu , Zhengwen Li
- Applicant: Huilong Zhu , Zhengwen Li
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent H. Daniel Schnurmann
- Main IPC: H01L31/00
- IPC: H01L31/00

Abstract:
A semiconductor structure and a method for fabricating the semiconductor structure provide a field effect device, such as a field effect transistor, that includes a spacer shaped metal gate located over a channel within a semiconductor substrate that separates a plurality of source and drain regions within the semiconductor substrate. Within the semiconductor structure, the plurality of source and drain regions is asymmetric with respect to the spacer shaped metal gate. The particular semiconductor structure may be fabricated using a self aligned dummy gate method that uses a portion of a spacer as a self alignment feature when forming the spacer shaped metal gate, which may have a sub-lithographic linewidth.
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