Invention Grant
- Patent Title: Poly crystalline silicon semiconductor device and method of fabricating the same
- Patent Title (中): 多晶硅半导体器件及其制造方法
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Application No.: US12216701Application Date: 2008-07-09
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Publication No.: US07768010B2Publication Date: 2010-08-03
- Inventor: Do-young Kim , Takashi Noguchi
- Applicant: Do-young Kim , Takashi Noguchi
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2003-0100618 20031230; KR10-2004-0052982 20040708
- Main IPC: H01L31/0376
- IPC: H01L31/0376 ; H01L31/20 ; H01L21/00

Abstract:
Provided are a poly crystalline silicon semiconductor device and a method of fabricating the same. Portions of a silicon layer except for gates are removed to reduce a parasitic capacitance caused from the silicon layer existing on gate bus lines. The silicon layer exists under the gates only, thus the parasitic capacitance is reduced and the deterioration and the delay of signals are prevented. Accordingly, the poly crystalline silicon semiconductor device, such as a thin film transistor, has excellent electric characteristics.
Public/Granted literature
- US20090001376A1 Poly crystalline silicon semiconductor device and method of fabricating the same Public/Granted day:2009-01-01
Information query
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