Invention Grant
US07768024B2 Horizontal emitting, vertical emitting, beam shaped, distributed feedback (DFB) lasers fabricated by growth over a patterned substrate with multiple overgrowth
有权
水平发射，垂直发射，束形，分布反馈（DFB）激光器，通过在具有多个过度生长的图案化衬底上生长制成
- Patent Title: Horizontal emitting, vertical emitting, beam shaped, distributed feedback (DFB) lasers fabricated by growth over a patterned substrate with multiple overgrowth
- Patent Title (中): 水平发射，垂直发射，束形，分布反馈（DFB）激光器，通过在具有多个过度生长的图案化衬底上生长制成
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Application No.: US11633148Application Date: 2006-12-04
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Publication No.: US07768024B2Publication Date: 2010-08-03
- Inventor: Claude C. A. Weisbuch , Shuji Nakamura
- Applicant: Claude C. A. Weisbuch , Shuji Nakamura
- Applicant Address: US CA Oakland
- Assignee: The Regents of the University of California
- Current Assignee: The Regents of the University of California
- Current Assignee Address: US CA Oakland
- Agency: Gates & Cooper LLP
- Main IPC: H01L29/06
- IPC: H01L29/06
Abstract:
A structure using integrated optical elements is comprised of a substrate, a buffer layer grown on the substrate, one or more first patterned layers deposited on top of the buffer layer, wherein each of the first patterned layers is comprised of a bottom lateral epitaxial overgrowth (LEO) mask layer and a LEO nitride layer filling holes in the bottom LEO mask layer, one or more active layers formed on the first patterned layers, and one or more second patterned layers deposited on top of the active layer, wherein each of the second patterned layers is comprised of a top LEO mask layer and a LEO nitride layer filling holes in the top LEO mask layer, wherein the top and/or bottom LEO mask layers act as a mirror, optical confinement layer, grating, wavelength selective element, beam shaping element or beam directing element for the active layers.
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