Invention Grant
- Patent Title: Thin film transistor including titanium oxides as active layer and method of manufacturing the same
- Patent Title (中): 包括钛氧化物作为活性层的薄膜晶体管及其制造方法
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Application No.: US12058399Application Date: 2008-03-28
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Publication No.: US07768042B2Publication Date: 2010-08-03
- Inventor: Jae-Woo Park , Seunghyup Yoo
- Applicant: Jae-Woo Park , Seunghyup Yoo
- Applicant Address: KR Daejeon
- Assignee: Korea Advanced Institute of Science and Technology
- Current Assignee: Korea Advanced Institute of Science and Technology
- Current Assignee Address: KR Daejeon
- Agency: KED & Associates, LLP
- Priority: KR10-2007-0031144 20070329; KR10-2007-0101638 20071009
- Main IPC: H01L29/80
- IPC: H01L29/80

Abstract:
Disclosed herein is a method of manufacturing a thin film transistor including titanium oxides as an active layer and the structure of the thin film transistor film manufactured using the method. The thin film transistor includes: a substrate; an active layer formed on the substrate using polycrystalline or amorphous titanium oxides; and an insulating layer formed on the active layer. Further, the method of manufacturing the thin film transistor includes: forming a substrate; forming an active layer on the substrate using polycrystalline or amorphous titanium oxides; and forming an insulating layer on the active layer. The present invention is advantageous in that the performance of the thin film transistor can be improved, the thin film transistor can be manufactured at low cost, harmful environmental problems can be solved, and the thin film transistor can be widely applied to various electronic apparatuses including, but not limited to, integrated drivers in active-matrix displays and transparent electronic devices.
Public/Granted literature
- US20080237595A1 THIN FILM TRANSISTOR INCLUDING TITANIUM OXIDES AS ACTIVE LAYER AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2008-10-02
Information query
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