Invention Grant
- Patent Title: Semiconductor component with integrated capacitance structure and method for fabrication thereof
- Patent Title (中): 具有集成电容结构的半导体元件及其制造方法
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Application No.: US10512017Application Date: 2003-03-24
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Publication No.: US07768054B2Publication Date: 2010-08-03
- Inventor: Thomas Benetik , Erwin Ruderer
- Applicant: Thomas Benetik , Erwin Ruderer
- Applicant Address: DE Munich
- Assignee: Infineon Technologies, AG
- Current Assignee: Infineon Technologies, AG
- Current Assignee Address: DE Munich
- Agency: Brinks Hofer Gilson & Lione
- Priority: DE10217567 20020419
- International Application: PCT/DE03/00964 WO 20030324
- International Announcement: WO03/090280 WO 20031030
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L23/522

Abstract:
A semiconductor component has an insulating layer which is formed on a semiconductor substrate and in which a capacitance structure (K) is formed. The capacitance structure (K) has at least two metallization planes (1 to 7) which are arranged parallel to one another and are each connected to an electrical connecting line. Arranged between the metallization planes (1 to 7) is at least one electrically conductive region (1a to 1j; 2a to 2j; 31a to 36a; 41a to 46a; 5a to 5f) for producing a capacitance surface, the electrically conductive region (1a to 1j; 2a to 2j; 31a to 36a; 41a to 46a; 5a to 5f) being electrically connected only to one of the metallization planes (1 to 7).
Public/Granted literature
- US20050208728A1 Semiconductor component having an integrated capactiance structure and method for producing the same Public/Granted day:2005-09-22
Information query
IPC分类: