Invention Grant
- Patent Title: Diamond ultraviolet sensor
- Patent Title (中): 钻石紫外线传感器
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Application No.: US11720159Application Date: 2005-11-22
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Publication No.: US07768091B2Publication Date: 2010-08-03
- Inventor: Yasuo Koide , Meiyong Liao , Antonio Alvarez Jose
- Applicant: Yasuo Koide , Meiyong Liao , Antonio Alvarez Jose
- Applicant Address: JP Tsukuba-shi
- Assignee: National Institute for Materials Science
- Current Assignee: National Institute for Materials Science
- Current Assignee Address: JP Tsukuba-shi
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2004-340657 20041125
- International Application: PCT/JP2005/021451 WO 20051122
- International Announcement: WO2006/057246 WO 20060601
- Main IPC: H01L31/00
- IPC: H01L31/00 ; H01L31/0312

Abstract:
In a conventional ultraviolet sensing device using a diamond semiconductor in a light-receiving unit, an Au-based electrode material is used for both a rectifier electrode and an ohmic electrode. However, the Au-based electrode material has fatal defects, such as poor adhesion to diamond, low mechanical strength, and furthermore poor thermal stability.While avoiding complication of the device structure and exploiting the characteristics of a photoconductive sensing device, by using a carbide compound (TiC, ZrC, HfC, VC, NbC, TaC, CrC, MoC, and WC) of a high melting metal having a high mechanical strength for a rectifier electrode and/or a ohmic electrode, there is provided an extremely heat-stable diamond ultraviolet sensor having a light-receiving sensitivity to ultraviolet light having a wavelength of 260 nm or less.
Public/Granted literature
- US20090134403A1 DIAMOND ULTRAVIOLET SENSOR Public/Granted day:2009-05-28
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