Invention Grant
- Patent Title: Semiconductor memory devices including a damascene wiring line
- Patent Title (中): 包括镶嵌线的半导体存储器件
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Application No.: US11499059Application Date: 2006-08-04
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Publication No.: US07768128B2Publication Date: 2010-08-03
- Inventor: Young-woo Cho , Kyung-tae Lee , Heon-jong Shin , Young-hwan Oh
- Applicant: Young-woo Cho , Kyung-tae Lee , Heon-jong Shin , Young-hwan Oh
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec
- Priority: KR10-2005-0074448 20050812
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40

Abstract:
Integrated circuit memory devices include an integrated circuit substrate and a plurality of lower wiring lines on the substrate and extending in a first direction. An interlayer insulating layer is on the plurality of lower wiring lines. An upper damascene wiring line is in an upper portion of the interlayer insulating layer and extending in a second direction, different from the first direction, to extend over the plurality of lower wiring lines. The upper damascene wiring line has protruded regions extending therefrom in a direction different from the second direction, the protruded regions extending over respective underlying ones of the lower wiring lines. A first via extends through the interlayer insulating layer under a first of the protruded regions and connects the upper damascene wiring line to a corresponding underlying first one of the plurality of wiring lines. A second via extends through the interlayer insulating layer under a second of the protruded regions and connects the upper damascene wiring line to a corresponding underlying second one of the plurality of wiring lines.
Public/Granted literature
- US20070035028A1 Semiconductor memory devices and methods of fabricating the same Public/Granted day:2007-02-15
Information query
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