Invention Grant
US07768156B2 Coil support unit, motor and exposure apparatus using the same, and device manufacturing method
有权
线圈支撑单元,使用其的电动机和曝光装置以及装置制造方法
- Patent Title: Coil support unit, motor and exposure apparatus using the same, and device manufacturing method
- Patent Title (中): 线圈支撑单元,使用其的电动机和曝光装置以及装置制造方法
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Application No.: US12018299Application Date: 2008-01-23
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Publication No.: US07768156B2Publication Date: 2010-08-03
- Inventor: Atsushi Ito
- Applicant: Atsushi Ito
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2003-399884 20031128
- Main IPC: H02K41/02
- IPC: H02K41/02

Abstract:
A motor apparatus includes a plurality of coils arranged along a first direction in a plane perpendicular to central axes thereof, a plurality of magnets each generating a force in cooperation with the coils, and a support member supporting the plurality of coils. Movement of the coils in the first direction due to thermal deformation of the coils is constrained by the coils contacting with a surface of the support member, and movement of the coils in a second direction, which is in the plane and perpendicular to the first direction, due to thermal deformation of the coils, is allowed by the coils sliding in the second direction along the surface.
Public/Granted literature
- US20080303354A1 COIL SUPPORT UNIT, MOTOR AND EXPOSURE APPARATUS USING THE SAME, AND DEVICE MANUFACTURING METHOD Public/Granted day:2008-12-11
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