Invention Grant
US07768156B2 Coil support unit, motor and exposure apparatus using the same, and device manufacturing method 有权
线圈支撑单元,使用其的电动机和曝光装置以及装置制造方法

Coil support unit, motor and exposure apparatus using the same, and device manufacturing method
Abstract:
A motor apparatus includes a plurality of coils arranged along a first direction in a plane perpendicular to central axes thereof, a plurality of magnets each generating a force in cooperation with the coils, and a support member supporting the plurality of coils. Movement of the coils in the first direction due to thermal deformation of the coils is constrained by the coils contacting with a surface of the support member, and movement of the coils in a second direction, which is in the plane and perpendicular to the first direction, due to thermal deformation of the coils, is allowed by the coils sliding in the second direction along the surface.
Information query
Patent Agency Ranking
0/0