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发明授权
US07768178B2 Piezoelectric device, piezoelectric actuator, and liquid discharge device having piezoelectric films 有权
压电器件，压电致动器和具有压电膜的液体放电器件

Piezoelectric device, piezoelectric actuator, and liquid discharge device having piezoelectric films
摘要：
In a piezoelectric device, a first electrode, a first piezoelectric film, a second piezoelectric film, and a second electrode are formed in this order on a first electrode formed above a surface of the substrate, and an intermediate electrode is arranged between the first and second piezoelectric films. Each of the first and second piezoelectric films has a thickness of 10 micrometers or smaller, and has a first surface facing toward the substrate and a second surface opposite to the first surface. At least one of the first and second surfaces has an arithmetic average surface roughness (Ra) of 0.5 micrometers or smaller.
摘要（中）：

在压电元件中，在形成于基板表面的第一电极上依次形成第一电极，第一压电膜，第二压电膜和第二电极，中间电极设置在第一和第二电极之间 第二压电薄膜。 第一和第二压电膜中的每一个具有10微米或更小的厚度，并且具有面向基板的第一表面和与第一表面相对的第二表面。 第一表面和第二表面中的至少一个具有0.5微米或更小的算术平均表面粗糙度（Ra）。

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