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US07768364B2 Bulk acoustic resonators with multi-layer electrodes 有权
具有多层电极的体声共振器

Bulk acoustic resonators with multi-layer electrodes
Abstract:
Bulk acoustic resonators with multi-layer electrodes for Bulk Acoustic Wave (BAW) resonator devices. Various electrode combinations are disclosed. The invention provides a better compromise at resonant frequencies from 1800 MHz to 4 GHz in terms of keff2 and resistance than state of the art solutions using either Mo, or a bilayer of Al and W.
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