Invention Grant
- Patent Title: Bulk acoustic resonators with multi-layer electrodes
- Patent Title (中): 具有多层电极的体声共振器
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Application No.: US12135431Application Date: 2008-06-09
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Publication No.: US07768364B2Publication Date: 2010-08-03
- Inventor: David Hart , Sudarsan Uppili , Guillaume Bouche
- Applicant: David Hart , Sudarsan Uppili , Guillaume Bouche
- Applicant Address: US CA Sunnyvale
- Assignee: Maxim Integrated Products, Inc.
- Current Assignee: Maxim Integrated Products, Inc.
- Current Assignee Address: US CA Sunnyvale
- Agency: Blakely Sokoloff Taylor & Zafman LLP
- Main IPC: H03H9/215
- IPC: H03H9/215 ; H01L41/047

Abstract:
Bulk acoustic resonators with multi-layer electrodes for Bulk Acoustic Wave (BAW) resonator devices. Various electrode combinations are disclosed. The invention provides a better compromise at resonant frequencies from 1800 MHz to 4 GHz in terms of keff2 and resistance than state of the art solutions using either Mo, or a bilayer of Al and W.
Public/Granted literature
- US20090302973A1 Bulk Acoustic Resonators with Multi-Layer Electrodes Public/Granted day:2009-12-10
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