Invention Grant
US07768366B1 Nanoparticles and corona enhanced MEMS switch apparatus 有权
纳米颗粒和电晕增强MEMS开关装置

Nanoparticles and corona enhanced MEMS switch apparatus
Abstract:
A life and electrical properties enhanced microelectromechanical systems (MEMS) switch apparatus in which a combined nanoparticle and ionic fluid lubricant is used to prolong switch elements operating lifetime and desirable electrical characteristics during this lifetime. Nanoparticle materials such as noble metal particles are combined with ionic corona producing liquid organic materials to achieve a desirable contact lubricant material serving to delay the onset of several disclosed classic contact failure mechanisms. Improvement over other contact lubricant materials and favorable contact testing results are included.
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