Invention Grant
- Patent Title: Nanoparticles and corona enhanced MEMS switch apparatus
- Patent Title (中): 纳米颗粒和电晕增强MEMS开关装置
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Application No.: US11998975Application Date: 2007-10-29
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Publication No.: US07768366B1Publication Date: 2010-08-03
- Inventor: Steven T. Patton , Jeffrey H. Sanders , Andrey A. Voevodin , Mark Pender , Richard A. Vaia , Robert I. MacCuspie , Steve J. Diamanti
- Applicant: Steven T. Patton , Jeffrey H. Sanders , Andrey A. Voevodin , Mark Pender , Richard A. Vaia , Robert I. MacCuspie , Steve J. Diamanti
- Applicant Address: US DC Washington
- Assignee: The United States of America as represented by the Secretary of the Air Force
- Current Assignee: The United States of America as represented by the Secretary of the Air Force
- Current Assignee Address: US DC Washington
- Agency: AFMCLO/JAZ
- Agent Gerald B. Hollins; Fredric L. Sinder
- Main IPC: H01H51/22
- IPC: H01H51/22

Abstract:
A life and electrical properties enhanced microelectromechanical systems (MEMS) switch apparatus in which a combined nanoparticle and ionic fluid lubricant is used to prolong switch elements operating lifetime and desirable electrical characteristics during this lifetime. Nanoparticle materials such as noble metal particles are combined with ionic corona producing liquid organic materials to achieve a desirable contact lubricant material serving to delay the onset of several disclosed classic contact failure mechanisms. Improvement over other contact lubricant materials and favorable contact testing results are included.
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