Invention Grant
US07768590B2 Production method of active matrix substrate, active matrix substrate, and liquid crystal display device 失效
有源矩阵基板,有源矩阵基板和液晶显示装置的生产方法

Production method of active matrix substrate, active matrix substrate, and liquid crystal display device
Abstract:
A method of manufacturing an active matrix substrate prevents an increase in the number of production steps while simultaneously preventing electrostatic discharge at a TFT channel. The method preferably includes the steps of forming a short-circuit wiring for connecting a data signal line or a source electrode to a drain electrode or a drain side circuit; successively forming an upper insulating film having an opening for short-circuit wiring separation and a transparent conductive film at a region above the short-circuit wiring as upper layers of the short-circuit wiring; and removing at least the transparent conductive film inside the opening for short-circuit wiring separation and the short-circuit wiring below the opening for short-circuit wiring separation to perform patterning of the pixel electrode and separation of the short-circuit wiring in the same step.
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