Invention Grant
- Patent Title: Exposure apparatus
- Patent Title (中): 曝光装置
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Application No.: US12334707Application Date: 2008-12-15
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Publication No.: US07768626B2Publication Date: 2010-08-03
- Inventor: Takashi Shibayama
- Applicant: Takashi Shibayama
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2005-167353 20050607
- Main IPC: G03B27/42
- IPC: G03B27/42

Abstract:
An exposure apparatus, which forms a latent image pattern on a substrate using an exposure beam, includes a first structure which supports a projection unit which projects an exposure beam onto a substrate, a first supporting leg which includes a first actuator and supports the first structure, a first state detector which detects a state of the first structure, a second structure which supports a substrate stage which aligns the substrate, a second supporting leg which includes a second actuator and supports the second structure, a second state detector which detects a state of the second structure, and a control unit which controls, on the basis of a signal from the first state detector and a signal from the second state detector, the first actuator and the second actuator so as to synchronize the first structure and the second structure with each other.
Public/Granted literature
- US20090141259A1 Exposure Apparatus Public/Granted day:2009-06-04
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