Invention Grant
US07768657B2 Optical fly height measurement 有权
光飞高度测量

Optical fly height measurement
Abstract:
An optical fly height measurement system includes a planar waveguide, a first diffraction grating for coupling an electromagnetic wave into the planar waveguide wherein the first diffraction grating is positioned for directing the electromagnetic wave towards an air bearing surface of a slider. A second diffraction grating is provided for receiving the electromagnetic wave reflected from the air bearing surface. A detector module and processor are provided to determine the fly height.
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