In profiling control of a contact type probe in which a contact point is moved along a surface of an object to be measured, while being in contact with the object by a constant measurement force F, a contact determination level is provided for detecting a predetermined force smaller than a target measurement force is applied to the contact point, contact determination is performed at the time when force applied to the contact point reaches the contact determination level during approach, and the contact point is shifted from position control to force control for bringing the contact point into contact with the object by the target measurement force. Thereby contact trace is prevented from occurring on the object to be measured without reducing approach speed as much as possible and lowering measurement efficiency. In this case, a command value of the force control may be interpolated and gradually increased from the contact determination level to the target measurement force, and thus impact increase and over-shoot can be prevented from causing due to high-response.