发明授权
- 专利标题: Fast-scanning SPM and method of operating same
- 专利标题(中): 快速扫描SPM及其操作方法
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申请号: US11832881申请日: 2007-08-02
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公开(公告)号: US07770231B2公开(公告)日: 2010-08-03
- 发明人: Craig Prater , Chanmin Su , Nghi Phan , Jeffrey M. Markakis , Craig Cusworth , Jian Shi , Johannes H. Kindt , Steven F. Nagle , Wenjun Fan
- 申请人: Craig Prater , Chanmin Su , Nghi Phan , Jeffrey M. Markakis , Craig Cusworth , Jian Shi , Johannes H. Kindt , Steven F. Nagle , Wenjun Fan
- 申请人地址: US NY Plainview
- 专利权人: Veeco Instruments, Inc.
- 当前专利权人: Veeco Instruments, Inc.
- 当前专利权人地址: US NY Plainview
- 代理机构: Boyle Fredrickson, S.C.
- 主分类号: G01N23/00
- IPC分类号: G01N23/00
摘要:
A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image. The method includes generating relative scanning movement between a probe of the SPM and a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec. A preferred SPM capable of achieving these results has a force controller having a force control bandwidth of at least closed loop bandwidth of at least 10 kHz.
公开/授权文献
- US20090032706A1 Fast-Scanning SPM and Method of Operating Same 公开/授权日:2009-02-05
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