Invention Grant
- Patent Title: Fast-scanning SPM and method of operating same
- Patent Title (中): 快速扫描SPM及其操作方法
-
Application No.: US11832881Application Date: 2007-08-02
-
Publication No.: US07770231B2Publication Date: 2010-08-03
- Inventor: Craig Prater , Chanmin Su , Nghi Phan , Jeffrey M. Markakis , Craig Cusworth , Jian Shi , Johannes H. Kindt , Steven F. Nagle , Wenjun Fan
- Applicant: Craig Prater , Chanmin Su , Nghi Phan , Jeffrey M. Markakis , Craig Cusworth , Jian Shi , Johannes H. Kindt , Steven F. Nagle , Wenjun Fan
- Applicant Address: US NY Plainview
- Assignee: Veeco Instruments, Inc.
- Current Assignee: Veeco Instruments, Inc.
- Current Assignee Address: US NY Plainview
- Agency: Boyle Fredrickson, S.C.
- Main IPC: G01N23/00
- IPC: G01N23/00

Abstract:
A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image. The method includes generating relative scanning movement between a probe of the SPM and a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec. A preferred SPM capable of achieving these results has a force controller having a force control bandwidth of at least closed loop bandwidth of at least 10 kHz.
Public/Granted literature
- US20090032706A1 Fast-Scanning SPM and Method of Operating Same Public/Granted day:2009-02-05
Information query