发明授权
US07771911B2 Process for producing photoresist composition, filter, coater and photoresist composition
有权
光致抗蚀剂组合物,过滤器,涂布机和光致抗蚀剂组合物的制造方法
- 专利标题: Process for producing photoresist composition, filter, coater and photoresist composition
- 专利标题(中): 光致抗蚀剂组合物,过滤器,涂布机和光致抗蚀剂组合物的制造方法
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申请号: US10536047申请日: 2003-12-18
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公开(公告)号: US07771911B2公开(公告)日: 2010-08-10
- 发明人: Hideo Hada , Takeshi Iwai , Masaaki Shimazaki , Masaaki Muroi , Kota Atsuchi , Hiroaki Tomida , Hirokazu Ozaki
- 申请人: Hideo Hada , Takeshi Iwai , Masaaki Shimazaki , Masaaki Muroi , Kota Atsuchi , Hiroaki Tomida , Hirokazu Ozaki
- 申请人地址: JP Kawasaki
- 专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址: JP Kawasaki
- 代理机构: Knobbe, Martens, Olson & Bear, LLP
- 优先权: JP2002-368931 20021219; JP2003-416583 20031215
- 国际申请: PCT/JP03/16268 WO 20031218
- 国际公布: WO2004/057422 WO 20040708
- 主分类号: G03C1/00
- IPC分类号: G03C1/00 ; C02F1/44
摘要:
A technique to acquire a photoresist composition which can reduce occurrence of defects of a resist pattern after development is provided. Further, a technique to obtain a photoresist composition having excellent storage stability characteristics as a resist solution (storage stability); and a technique to obtain a photoresist composition which reduces the change of sensitivity and resist pattern size after treatment almost completely are provided. A photoresist composition containing a resin component (A), an acid-generating component (B) for generating an acid under exposure, and an organic solvent (C) is passed through a first filter 2a equipped with a first membrane having zeta potential of more than −20 mV but no more than 15 mV in distilled water of pH 7.0.
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