发明授权
US07772649B2 SOI field effect transistor with a back gate for modulating a floating body
失效
具有用于调制浮体的背栅的SOI场效应晶体管
- 专利标题: SOI field effect transistor with a back gate for modulating a floating body
- 专利标题(中): 具有用于调制浮体的背栅的SOI场效应晶体管
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申请号: US12036325申请日: 2008-02-25
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公开(公告)号: US07772649B2公开(公告)日: 2010-08-10
- 发明人: Kangguo Cheng , Louis C. Hsu , Jack A. Mandelman , Carl Radens , William Tonti
- 申请人: Kangguo Cheng , Louis C. Hsu , Jack A. Mandelman , Carl Radens , William Tonti
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 H. Daniel Schnurmann
- 主分类号: H01L27/01
- IPC分类号: H01L27/01 ; H01L27/12 ; H01L31/0392
摘要:
A masking layer is applied over a top semiconductor layer and patterned to expose in an opening a shallow trench isolation structure and a portion of a top semiconductor region within which a first source/drain region and a body is to be formed. Ions are implanted into a portion of a buried insulator layer within the area of the opening to form damaged buried insulator region. The shallow trench isolation structure is removed and the damaged buried insulator region is etched selective to undamaged buried insulator portions to form a cavity. A dielectric layer is formed on the sidewalls and the exposed bottom surface of the top semiconductor region and a back gate filling the cavity is formed. A contact is formed to provide an electrical bias to the back gate so that the electrical potential of the body and the first source/drain region is electrically modulated.
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