发明授权
US07772653B1 Semiconductor apparatus comprising bipolar transistors and metal oxide semiconductor transistors 有权
包括双极晶体管和金属氧化物半导体晶体管的半导体

Semiconductor apparatus comprising bipolar transistors and metal oxide semiconductor transistors
摘要:
A method for manufacturing a semiconductor apparatus is disclosed. The apparatus comprises double poly bipolar transistors and double poly metal oxide semiconductor (MOS) transistors. The bipolar transistors and the MOS transistors are manufactured in a unified process in which a first polysilicon layer (Poly1) is doped to form the extrinsic bases in the bipolar transistors and to form the gates in the MOS transistors. A second polysilicon layer (Poly2) is doped to form emitters in the bipolar transistors and to form the sources and drains in the MOS transistors. The method of the invention minimizes the number of manufacturing process steps.
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