发明授权
- 专利标题: Semiconductor apparatus comprising bipolar transistors and metal oxide semiconductor transistors
- 专利标题(中): 包括双极晶体管和金属氧化物半导体晶体管的半导体
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申请号: US10777012申请日: 2004-02-11
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公开(公告)号: US07772653B1公开(公告)日: 2010-08-10
- 发明人: Richard W. Foote , Robert Oliver
- 申请人: Richard W. Foote , Robert Oliver
- 申请人地址: US CA Santa Clara
- 专利权人: National Semiconductor Corporation
- 当前专利权人: National Semiconductor Corporation
- 当前专利权人地址: US CA Santa Clara
- 主分类号: H01L29/96
- IPC分类号: H01L29/96
摘要:
A method for manufacturing a semiconductor apparatus is disclosed. The apparatus comprises double poly bipolar transistors and double poly metal oxide semiconductor (MOS) transistors. The bipolar transistors and the MOS transistors are manufactured in a unified process in which a first polysilicon layer (Poly1) is doped to form the extrinsic bases in the bipolar transistors and to form the gates in the MOS transistors. A second polysilicon layer (Poly2) is doped to form emitters in the bipolar transistors and to form the sources and drains in the MOS transistors. The method of the invention minimizes the number of manufacturing process steps.
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