发明授权
- 专利标题: Methods of fabricating nonvolatile memory devices
- 专利标题(中): 制造非易失性存储器件的方法
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申请号: US11390662申请日: 2006-03-28
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公开(公告)号: US07772654B2公开(公告)日: 2010-08-10
- 发明人: Yoo-Cheol Shin , Jung-Dal Choi
- 申请人: Yoo-Cheol Shin , Jung-Dal Choi
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec
- 优先权: KR10-2005-0030458 20050412
- 主分类号: H01L27/088
- IPC分类号: H01L27/088
摘要:
Nonvolatile memory devices and methods of fabricating the same are provided. A semiconductor substrate is provided having a cell field region and a high-voltage field region. Device isolation films are provided on the substrate. The device isolation films define active regions of the substrate. A cell gate-insulation film and a cell gate-conductive film are provided on the cell field region of the substrate including the device isolation films. A high-voltage gate-insulation film and a high-voltage gate-conductive film are provided on the high-voltage field region of the substrate including the device isolation films. The device isolation film on the high-voltage field region of the substrate is at least partially recessed to provide a groove therein.
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