发明授权
- 专利标题： Filter window manufacturing method
- 专利标题（中）： 过滤窗制造方法
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申请号： US11878989申请日： 2007-07-30
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公开(公告)号： US07776390B2公开(公告)日： 2010-08-17
- 发明人: Ralph Kurt , Levinus Pieter Bakker
- 申请人： Ralph Kurt , Levinus Pieter Bakker
- 申请人地址： NL Veldhoven
- 专利权人： ASML Netherlands B.V.
- 当前专利权人： ASML Netherlands B.V.
- 当前专利权人地址： NL Veldhoven
- 代理机构： Pillsbury Winthrop Shaw Pittman, LLP
- 优先权： EP03077350 20030725
- 主分类号： B05D5/06
- IPC分类号： B05D5/06
摘要：
A filter window manufacturing method includes fabricating a structure of wires on a substrate, depositing a lacquer over the wires and the substrate, depositing a first layer that includes a material selected from the group consisting of AlN, Ru, Ir, Au, SiN, Rh, C and combinations thereof, removing the lacquer, removing the substrate, and baking the first layer.
公开/授权文献
- US20080254211A1 Filter window manufacturing method 公开/授权日：2008-10-16
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