发明授权
US07777264B2 Random access memory device utilizing a vertically oriented select transistor
有权
利用垂直取向的选择晶体管的随机存取存储器件
- 专利标题: Random access memory device utilizing a vertically oriented select transistor
- 专利标题(中): 利用垂直取向的选择晶体管的随机存取存储器件
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申请号: US11708616申请日: 2007-02-21
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公开(公告)号: US07777264B2公开(公告)日: 2010-08-17
- 发明人: Thomas W. Voshell , Lucien J. Bissey , Kevin G. Duesman
- 申请人: Thomas W. Voshell , Lucien J. Bissey , Kevin G. Duesman
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Dickstein Shapiro LLP
- 主分类号: H01L27/108
- IPC分类号: H01L27/108
摘要:
A memory structure has a vertically oriented access transistor with an annular gate region. A transistor is fabricated such that the channel of the transistor extends outward with respect to the surface of the substrate. An annular gate is fabricated around the vertical channel such that it partially or completely surrounds the channel. A buried annular bitline may also be implemented. After the vertically oriented transistor is fabricated with the annular gate, a storage device may be fabricated over the transistor to provide a memory cell.
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