发明授权
- 专利标题: Nano-fuse structural arrangements having blow protection barrier spaced from and surrounding fuse link
- 专利标题(中): 纳米熔丝结构布置具有隔离和围绕熔断体的防风保护栅
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申请号: US11566865申请日: 2006-12-05
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公开(公告)号: US07777296B2公开(公告)日: 2010-08-17
- 发明人: Haining S. Yang , Jack A. Mandelman
- 申请人: Haining S. Yang , Jack A. Mandelman
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Joseph P. Abate; Daryl Neff
- 主分类号: H01L23/525
- IPC分类号: H01L23/525
摘要:
A nano-fuse structural arrangement, includes, for example, a semiconductor substrate having an electrically conductive region formed thereon; an electrically conductive elongated nano-structure having a maximum diameter of less than approximately 50 nm and a maximum length of approximately 250 nm and being formed on the electrically conductive region; a barrier having barrier parts completely spaced from and completely surrounding elongated outer surfaces of the nano-structure, the spaces between the barrier and surfaces consisting essentially of a vacuum and being approximately equally spaced, so that the electrically conductive elongated nano-structure is blowable responsive to an electrical current flowable there through in a range of approximately 4 μA to approximately 120 μA.
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