发明授权
- 专利标题: Semiconductor device
- 专利标题(中): 半导体器件
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申请号: US11979728申请日: 2007-11-07
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公开(公告)号: US07777340B2公开(公告)日: 2010-08-17
- 发明人: Yuichi Nakao , Satoshi Kageyama , Masaru Naitou
- 申请人: Yuichi Nakao , Satoshi Kageyama , Masaru Naitou
- 申请人地址: JP Kyoto
- 专利权人: Rohm Co., Ltd.
- 当前专利权人: Rohm Co., Ltd.
- 当前专利权人地址: JP Kyoto
- 代理机构: Rabin & Berdo, PC
- 优先权: JP2006-302982 20061108; JP2006-306998 20061113
- 主分类号: H01L29/72
- IPC分类号: H01L29/72
摘要:
The semiconductor device according to the present invention includes a semiconductor substrate, a first insulating layer laminated on the semiconductor substrate, a first metal wiring pattern embedded in a wire-forming region of the first insulating layer, a second insulating layer laminated on the first insulating layer, a second metal wiring pattern embedded in a wire-forming region of the second insulating layer and first dummy metal patterns embedded each in a wire-opposed region opposing to the wire-forming region of the second insulating layer and in a non-wire-opposed region opposing to a non-wire-forming region other than the wire-forming region of the second insulating layer, the wire-opposed region and the non-wire-opposed region each in a non-wire-forming region other than the wire-forming region of the first insulating layer.
公开/授权文献
- US20080237870A1 Semiconductor device 公开/授权日:2008-10-02
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