Invention Grant
- Patent Title: Semiconductor device having through electrode and method of fabricating the same
- Patent Title (中): 具有通孔电极的半导体器件及其制造方法
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Application No.: US12132925Application Date: 2008-06-04
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Publication No.: US07777345B2Publication Date: 2010-08-17
- Inventor: Ho-Jin Lee , Nam-Seog Kim , Yong-Chai Kwon , Hyun-Soo Chung , In-Young Lee , Son-Kwan Hwang
- Applicant: Ho-Jin Lee , Nam-Seog Kim , Yong-Chai Kwon , Hyun-Soo Chung , In-Young Lee , Son-Kwan Hwang
- Applicant Address: KR Yeongtong-gu, Suwon-si Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Yeongtong-gu, Suwon-si Gyeonggi-do
- Agency: Muir Patent Consulting, PLLC
- Priority: KR10-2007-0066168 20070702
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
A semiconductor device having a through electrode and a method of fabricating the same are disclosed. In one embodiment, a semiconductor device includes a first insulating layer formed on a semiconductor substrate. A wiring layer having a first aperture to expose a portion of the first insulating layer is formed on the first insulating layer. A second insulating layer is formed on an upper portion of the wiring layer and in the first aperture. A conductive pad having a second aperture to expose a portion of the second insulating layer is formed on the second insulating layer. A through hole with a width narrower than widths of the first and second apertures is formed through the first and second insulating layers and an upper portion of the semiconductor substrate. A through electrode is formed in the through hole.
Public/Granted literature
- US20090008790A1 SEMICONDUCTOR DEVICE HAVING THROUGH ELECTRODE AND METHOD OF FABRICATING THE SAME Public/Granted day:2009-01-08
Information query
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