Invention Grant
- Patent Title: Linear-carrier phase-mask interferometer
- Patent Title (中): 线性载波相位掩模干涉仪
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Application No.: US11800840Application Date: 2007-05-08
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Publication No.: US07777895B2Publication Date: 2010-08-17
- Inventor: Brian S. Medower , James E. Millerd
- Applicant: Brian S. Medower , James E. Millerd
- Applicant Address: US AZ Tucson
- Assignee: 4D Technology Corporation
- Current Assignee: 4D Technology Corporation
- Current Assignee Address: US AZ Tucson
- Agent Antonio R. Durando
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
A phase-difference sensor measures the spatially resolved difference in phase between orthogonally polarized reference and test wavefronts. The sensor is constructed as a linear-carrier phase-mask aligned to and imaged on a linear-carrier detector array. Each adjacent element of the phase-mask measures a predetermined relative phase shift between the orthogonally polarized reference and test beams. Thus, multiple phase-shifted interferograms can be synthesized at the same time by combining pixels with identical phase-shifts. The multiple phase-shifted interferograms can be combined to calculate standard parameters such as modulation index or average phase step. Any configuration of interferometer that produces orthogonally polarized reference and object beams may be combined with the phase-difference sensor of the invention to provide single-shot, simultaneous phase-shifting measurements.
Public/Granted literature
- US20070211256A1 Linear-carrier phase-mask interferometer Public/Granted day:2007-09-13
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