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US07778008B2 Capacitor structure and method of manufacturing the same 失效
电容器结构及其制造方法

Capacitor structure and method of manufacturing the same
Abstract:
In a capacitor structure and a method of manufacturing the capacitor structure, first and second conductive patterns are formed on a substrate. The first and second conductive patterns extend in a first direction. The first and second conductive patterns are alternately arranged to be spaced apart from one another in a second direction substantially perpendicular to the first direction. An insulating interlayer is formed on the substrate to cover the first and second conductive patterns. Third and fourth conductive patterns extending in a third direction lying at an angle of between about 0° and about 90° relative to the first direction are formed on the insulating interlayer. The third and fourth conductive patterns are alternately arranged to be spaced apart from one another in a fourth direction substantially perpendicular to the third direction.
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