Invention Grant
- Patent Title: System for controlling nucleation in self-assembled films
- Patent Title (中): 用于控制自组装膜中成核的系统
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Application No.: US11468711Application Date: 2006-08-30
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Publication No.: US07779883B2Publication Date: 2010-08-24
- Inventor: Ya-Hong Xie
- Applicant: Ya-Hong Xie
- Applicant Address: US CA Oakland
- Assignee: The Regents of the University of California
- Current Assignee: The Regents of the University of California
- Current Assignee Address: US CA Oakland
- Agency: Vista IP Law Group LLP
- Main IPC: B32B37/00
- IPC: B32B37/00
Abstract:
A device for forming a self-assembled film on a substrate containing a film precursor includes a first heating member and a second heating member disposed adjacent to the first heating member, the second heating member being separated from the first heating member by a gap. The device includes a movable pusher member configured for advancing the substrate from the first heating member to the second heating member.
Public/Granted literature
- US20070077359A1 METHOD AND APPARATUS FOR CONTROLLING NUCLEATION IN SELF-ASSEMBLED FILMS Public/Granted day:2007-04-05
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