发明授权
US07780491B2 Process for manufacturing plasma display panel and substrate holder
有权
制造等离子体显示面板和基板支架的工艺
- 专利标题: Process for manufacturing plasma display panel and substrate holder
- 专利标题(中): 制造等离子体显示面板和基板支架的工艺
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申请号: US11640339申请日: 2006-12-18
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公开(公告)号: US07780491B2公开(公告)日: 2010-08-24
- 发明人: Michihiko Takase , Jun Shinozaki , Hiroyuki Furukawa
- 申请人: Michihiko Takase , Jun Shinozaki , Hiroyuki Furukawa
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: Steptoe & Johnson LLP
- 优先权: JP2003-039319 20030218
- 主分类号: H01J17/49
- IPC分类号: H01J17/49 ; H01J9/24 ; H01K1/18
摘要:
The invention relates to a process for manufacturing plasma display panel and a substrate holder, preventing an occurrence of dust giving an unfavorable effect in a forming process of a film on a substrate of a plasma display panel in a film forming apparatus. When forming the film, a substrate (3) and a dummy substrate (35) are held by a first substrate holder (31) composed of a supporter sustaining underneath the substrate and a restrictor restricting a position of the substrates (3) in a plane direction, and a second substrate holder (32) sustaining the first substrate holder (31).
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