发明授权
US07780491B2 Process for manufacturing plasma display panel and substrate holder 有权
制造等离子体显示面板和基板支架的工艺

Process for manufacturing plasma display panel and substrate holder
摘要:
The invention relates to a process for manufacturing plasma display panel and a substrate holder, preventing an occurrence of dust giving an unfavorable effect in a forming process of a film on a substrate of a plasma display panel in a film forming apparatus. When forming the film, a substrate (3) and a dummy substrate (35) are held by a first substrate holder (31) composed of a supporter sustaining underneath the substrate and a restrictor restricting a position of the substrates (3) in a plane direction, and a second substrate holder (32) sustaining the first substrate holder (31).
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